eBGDAEHarm.1=12522444240667322444466522212625447558459444101222143112(2)24122222221324244444140661522201612202221744444(0)18020202190224200200440021244442222444(4)(4)2342422424254221261522122751422282229222030(2)(2)22222(2)(2)(2)3112201220(1)220(2)(0)2223244424330400046000344243501002200202361(1)02243700000220003804422390001220402012222(2)(2)12441040004600042464664(6)(4)24430100220224401(1)222445000000220004602422470000444044XX4448244404494400(0)4502(0)420(X)(X)51220222052001221153544542554256224Harm.57406675822459446660222126125446255634564444651222143662(2)2467222222682424444469066700222071012202227244444(0)73020202740224750200440076244442277444(4)(4)78424279248042218125121282142283(5)842222285086(2)(2)22222(2)(2)(2)8712201220(1)220(2)(0)2228844400XX(4)24890400000066XX0060049066X67249101002022XX002921202(1)2249300000(0)(2)(2)(X)(X)200094044229500001220012961220001220122(1)2212XX224970400000066XX0060049866X67249901002202XX02210001(1)022410100000022000102024221034000444044XX441042444041054400(0)41062(0)420(X)(X)1072202220108002111095441102111421124571137099911479997Harm.1157999116=75979891179066076(7)611855670